Method of synthesizing a compound of the formula Mn+1AXn, film of the compound and its use
AssigneeABB AB
InventorsPeter Isberg, Jens-Petter Palmquist, Ulf Jansson, Lars Hultman, Jens Birch, Timo Seppänen
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Abstract
A method of synthesizing or growing a compound having the general formula Mn+1AXn(16) where M is a transition metal, n is 1, 2, 3 or higher, A is an A-group element and X is carbon, nitrogen or both, which comprises the step of exposing a substrate to gaseous components and/or components vaporized from at least one solid source (13, 14, 15) whereby said components react with each other to produce the Mn+1AXn (16) compound.
Claims34
A method of synthesizing or growing a compound having the general formula Mn+1AXn where M is at least one transition metal, n is 1, 2, 3 or higher, A is at least one A-group element and X is carbon, nitrogen or both, the method comprising:
- producing a seed layer on a substrate by vaporizing components for producing the seed layer from at least one solid source by physical vapor deposition, the seed layer comprising at least one material exhibiting an epitaxial relationship or a preferred crystallographic orientation to the Mn+1AXn compound to be synthesized or grown and comprising a transition metal carbide or nitride or carbonitride or oriented graphite or C60;
- and
- exposing the substrate to components vaporized from at least one solid source whereby said components, or said components in combination with at least one gaseous component, react with each other to produce the Mn+1AXn compound on the seed layer.
A film produced by a method of synthesizing or growing a compound having the general formula Mn+1AXn where M is at least one transition metal, n is 1, 2, 3 or higher, A is at least one A-group element and X is carbon, nitrogen or both, wherein the method comprises exposing a substrate to components vaporized from at least one solid source whereby said components, or said components in combination with at least one gaseous component, react with each other to produce the Mn+1AXn compound, the film comprising:
- at least one epitaxial Mn+1AXn layer.
Dependencies are inferred from the claim text.