Method for analysis through layer-by-layer sample removal using a cantilever probe
AssigneeInternational Business Machines Corporation
InventorGerd K. Binnig
Life of this patent
Estimating the term…
Abstract
A method and apparatus for analysis of a sample. The method includes an accessing operation for accessing a region of the sample via a tip of at least one probe mounted on a cantilever. A removing operation removes a sample material from the region that is accessed by the tip of the at least one probe mounted on the cantilever. A sensing operation senses a parameter associated to the removal of the sample material in the removing operation. The accessing, removing, and sensing operations are repeated to facilitate removal of at least one layer of the sample.
Claims1
A method for analysis of a sample comprising:
- accessing a region of the sample via a tip of at least one probe mounted on a cantilever, wherein the shape of the tip of is one of a conical shape and a wedge shape;
- removing a sample material from the region that is accessed by the tip of the at least one probe mounted on the cantilever, wherein the sample material is one of an atom of the sample and a molecule of the sample, wherein removal of the sample material is selected to be performed by heat applied to the tip of the at least one probe mounted on the cantilever, and wherein the heat applied to the tip of the at least one probe mounted on the cantilever is selected to be performed by an integrated heater that is integrated into the cantilever onto which the at least one probe is mounted;
- sensing a parameter associated to the removal of the sample material in the removing operation, wherein sensing of the parameter associated to the removal of the sample material is selected to be done by a combination of an integrated sensor that is integrated into the cantilever onto which the at least one probe is mounted, an external sensor, measuring a deflection of the cantilever onto which the at least one probe is mounted and measuring the temperature of the integrated heater, wherein the integrated sensor comprises one of:
- a vibration sensor, a charge sensor, a temperature sensor and a combination of a vibration sensor, a charge sensor and a temperature sensor, and wherein the external sensor comprises one of:
- a pressure sensor, a smell sensor, a mass-spectrometer and a combination of a pressure sensor, a smell sensor and a mass-spectrometer;
- and
- removing debris from a surface of the sample, the debris resulting from the removal of the sample material in the removing operation from the region that is accessed by the tip of the at least one probe mounted on the cantilever;
- and
- wherein the accessing, removing and sensing operations are repeated to facilitate removal of at least one layer of the sample, wherein the at least one layer of the sample is removed via a predetermined number of steps, the heat applied to the tip of the at least one probe mounted on the cantilever being increased at each step relative to the previous step until the predetermined number of steps are completed, and wherein a spring constant value of the cantilever onto which the at least one probe is mounted is switched to another spring constant value before the at least another layer of the sample is removed;
- wherein the accessing, removing and sensing operations are repeated to facilitate removal of at least another layer of the sample;
- and
- wherein the sample is a biological sample which is frozen prior to the accessing operation being performed.
Dependencies are inferred from the claim text.