Object positioning method for a lithographic projection apparatus

A method of positioning an object at a required position on a first object table in a lithographic projection apparatus, comprising:

• placing an object at a first position on the first object table;
• measuring a displacement between the first position of the object and a required position of the object on the first object table;
• removing the object from the first object table;
• translating the removed object, the first object table, or both, relative to each other by substantially the measured displacement, in a direction substantially parallel to the plane of the first object table;
• and
• placing the object at substantially the required position on the first object table,
• wherein a first surface of the object contacts the first object table, and wherein the required position corresponds to a position of the object at which a clamping force that clamps the object on the first object table is substantially homogenous on the first surface of the object.