Run-off path to collect liquid for an immersion lithography apparatus
AssigneeNikon Corporation
InventorW. Thomas Novak
Life of this patent
Estimating the term…
Abstract
An exposure apparatus for transferring an image to a device includes an optical assembly, an immersion fluid system, and a device stage assembly. The optical assembly is positioned so that there is a gap above the device. The immersion fluid system fills the gap with an immersion fluid. The device stage assembly includes a sloped region that facilitates movement of the immersion fluid that exits the gap away from the device. The device stage assembly can include a collection region and a recovery system that recovers immersion fluid from the collection region.
Claims35
An apparatus comprising:
- a support that supports a device;
- an optical assembly that projects an image onto the device;
- an immersion liquid system that provides an immersion liquid to a gap between the device and the optical assembly;
- and
- a device stage assembly that includes the support, the device stage assembly including a sloped region extending outwardly in a radial direction with respect to the support, provided near the support to facilitate a flow of immersion liquid away from the device, the sloped region provided on a portion of the device stage assembly that moves relative to the optical assembly.
An apparatus comprising:
- a support that retains a device;
- an optical assembly that projects an image onto the device;
- an immersion liquid system that provides an immersion liquid to a gap between the device and the optical assembly;
- and
- a device stage assembly including a device stage that includes the support and a stage mover assembly that moves the device stage, the device stage including a sloped region provided near the support to facilitate the flow of immersion liquid away from the device, the sloped region extending outwardly in a radial direction with respect to the support and being at an angle of at least approximately three degrees relative to a surface of the device.
A method for transferring an image to a device, the method comprising:
- supporting the device with a support;
- providing an optical assembly that projects the image onto the device;
- delivering an immersion liquid to a gap between the optical assembly and the device with an immersion liquid system;
- and
- moving the support with a device stage assembly, the device stage assembly including a sloped region positioned near the device, the sloped region extending outwardly in a radial direction with respect to the support to facilitate the flow of the immersion liquid away from the device, the sloped region provided on a portion of the device stage assembly that moves relative to the optical assembly.
Dependencies are inferred from the claim text.