Integrated local and global optical metrology for samples having miniature features

A method for integrated measurement of a sample having miniature features, said method comprising:

• a) illuminating said sample with a global test radiation over an optical test region;
• b) obtaining an optical response from said optical test region to said global test radiation;
• c) selecting a local material parameter ρ exhibiting substantial uniformity over said optical test region;
• d) measuring said local material parameter ρ of said sample with a scanning probe tip at a test location within said optical test region;
• e) determining a property of said miniature features within said optical test region from said optical response supplemented with an adjustment derived from said local material parameter ρ.

An apparatus for integrated measurement of a sample having miniature features, said apparatus comprising:

• a) an optical measuring unit for illuminating said sample with a global test radiation over an optical test region;
• b) a detector for obtaining an optical response from said optical test region;
• c) a local measuring unit for measuring a local material parameter of said sample with a scanning probe tip at a test location within said optical test region, said local material parameter being selected to exhibit substantial uniformity over said optical test region;
• d) a computation unit for determining a property of said miniature features within said optical test region from said optical response supplemented with an adjustment derived from said local material parameter.