Composite shadow ring assembled with dowel pins and method of using
AssigneeTaiwan Semiconductor Mfg. Co., Ltd.
InventorsChang-Jung Li, Wen-Ming Chen, Kun-Yen Fan, Wen-Chi Wang
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Abstract
A composite shadow ring that is constructed of an upper ring and a lower ring assembled together by a plurality of dowel pins and a method for using the ring. The upper ring and the lower ring each has a predetermined outside diameter that is substantially the same, a planar top surface and a planer bottom surface parallel to the planar top surface. Each of the planar bottom surface of the upper ring and the planar top surface of the lower ring has at least two blind holes formed therein. A plurality of dowel pins are used to frictionally engage the at least two blind holes in the upper ring and the at least two blind holes in the lower ring.
Claims10
A composite shadow ring comprising:
- a first ring having a first outside diameter, a planar top surface and a planar bottom surface parallel to the planar top surface, said planar bottom surface having at least two blind holes therein;
- a second ring having a second outside diameter substantially similar to said first outside diameter, a planar top surface and a planar bottom surface parallel to said planar top surface, said planar top surface having at least two blind holes therein;
- and
- at least two dowel pins connecting said first and second ring together by frictionally engaging said at least two blind holes in said first ring and said at least two blind holes in said second ring with said bottom planar surface of the first ring abutting said top planar surface of the second, ring wherein said at least two dowel pins are each formed of injection molded plastic.
Dependencies are inferred from the claim text.