Substrate cleaning device
AssigneeSamsung Electronics Co., Ltd.
InventorIn-Joon Yeo
Life of this patent
Estimating the term…
Abstract
A substrate cleaning device comprises a chamber for cleaning a substrate; a substrate support installed in the chamber providing a surface for supporting the substrate during cleaning thereof; at least one cleaning solution supply outlet for spraying a cleaning solution onto a surface of the substrate; a vibration force generator for supplying a vibratory action; a vibration force generating shaft which receives said vibratory action from the vibration force generator so that said vibration force generating shaft vibrates for agitating the cleaning solution on the substrate; and a vibration force distributor for preventing a vibration force from being concentrated on a portion of the substrate below the vibration force generating shaft.
Claims26
A substrate cleaning device, comprising:
- a chamber for cleaning a substrate;
- a substrate support installed in the chamber providing a surface for supporting the substrate during cleaning thereof;
- at least one cleaning solution supply outlet for spraying a cleaning solution onto a surface of the substrate;
- a vibration force generator for supplying a vibratory action;
- a vibration force generating shaft which receives said vibratory action from the vibration force generator so that said vibration force generating shaft vibrates for agitating the cleaning solution on the substrate;
- and
- a vibration force distributor forming a liquid film on a surface of the vibration force generating shaft for preventing a vibration force from being concentrated on a portion of the substrate below the vibration force generating shaft, wherein the vibration force distributor is installed above the vibration force generating shaft to spray the liquid onto the vibration force generating shaft.
A method for cleaning a substrate, comprising:
- introducing said substrate into a chamber for cleaning said substrate;
- spraying a cleaning solution onto a surface of the substrate;
- providing a vibration force generating shaft;
- spraying a liquid onto a surface of the vibration force generating shaft for preventing the concentration of said vibration force thereon;
- vibrating said vibration force generating shaft for agitating the cleaning solution on the substrate;
- and
- preventing a vibration force from being concentrated on a portion of the substrate below the vibration force generating shaft.
Dependencies are inferred from the claim text.