Force method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators
AssigneeAgilent Technologies, Inc.
InventorsRichard K. Workman, Storrs T. Hoen, George M. Clifford, Jr.
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Abstract
In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.
Claims20
A method for determining a spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMS actuator having an actuator spring constant comprising:
- applying a force to a scanning probe tip mechanically coupled to said scanning probe cantilever;
- determining a first deflection comprising a deflection of said MEMS actuator in response to said force;
- and
- determining said spring constant using said first deflection and said actuator spring constant.
A method for determining a spring constant of a scanning probe microscope cantilever mechanically coupled to an electrostatic MEMS motor rotor having an actuator spring constant comprising:
- applying a force to a scanning probe tip mechanically coupled to said scanning probe cantilever;
- determining a first deflection comprising a deflection of said electrostatic MEMS motor rotor and a second deflection comprising a deflection of said scanning probe microscope cantilever with respect to said electrostatic MEMS motor rotor in response to said force;
- and
- determining said spring constant using said first deflection, said second deflection and said actuator spring constant.
A method for determining a spring constant of a scanning probe microscope cantilever mechanically coupled to an electrostatic comb drive rotor having an actuator spring constant comprising:
- applying a force to a scanning probe tip mechanically coupled to said scanning probe cantilever;
- determining a first deflection of said electrostatic comb drive rotor and a second deflection of said scanning probe microscope cantilever with respect to said electrostatic comb drive rotor in response to said force;
- and
- determining said spring constant using said first deflection, said second deflection and said actuator spring constant.
Dependencies are inferred from the claim text.