Dust remover and dust removal method
AssigneeNix, Inc.
InventorsNobuo Katsuura, Atsunori Nakata, Ryoji Saito
Life of this patent
Estimating the term…
Abstract
A dust remover includes: a rotary brush for removing dust from a workpiece; a workpiece carrying unit for carrying the workpiece in a first direction; a brush rotation unit for rotating the rotary brush around its axis in synchronization with the movement of the workpiece carrying unit; and a back-and-forth brush movement unit for moving the rotary brush back and forth along its axis, a second direction intersecting with the first direction, in synchronization with the movement of the workpiece carrying unit.
Claims10
A dust remover comprising:
- a rotary brush for removing dust from a workpiece;
- a workpiece carrying unit for carrying the workpiece in a direction intersecting with the axis of the rotary brush;
- a brush rotation unit for rotating the rotary brush around its axis in synchronization with the movement of the workpiece carrying unit;
- and
- a back-and-forth brush movement unit for moving the rotary brush back and forth along its axis in synchronization with the movement of the workpiece carrying unit,
- wherein the brush rotation unit includes:
- a motor as a drive source;
- and
- a power transmitter that transmits rotary force of the motor to the rotary brush while allowing the rotary brush to move back and forth;
- and
- wherein the back-and-forth brush movement unit includes:
- an actuator as a drive source;
- and
- a power transmitter that converts power of the actuator to a back-and-forth motion for the rotary brush and transmits the back-and-forth motion to the rotary brush while allowing the rotary brush to rotate.
A dust remover comprising:
- a rotary rush for removing dust from the surface of a disk-shaped workpiece;
- a workpiece rotation unit for rotating the workpiece around its center;
- a brush movement unit for moving the brush back and forth along a radius of the workpiece in synchronization with the rotation of the workpiece by the workpiece rotation unit;
- and
- a brush rotation unit for rotating the brush around its axis in synchronization with a movement of the workpiece rotation unit,
- wherein the brush rotation unit includes:
- a motor as a drive source;
- and
- a power transmitter that transmits rotary force of the motor to the brush while allowing the brush to move back and forth;
- and
- wherein the brush movement unit includes:
- an actuator as a drive source;
- and
- a power transmitter that converts power of the actuator to a back-and-forth motion for the brush and transmits the bank-and-forth motion to the brush while allowing the brush to rotate.
A method for removing dust from a workpiece using a dust remover by relatively moving a brush positioned opposite the workpiece, wherein the brush is moved relative to the workpiece in a first direction and also in a second direction intersecting with the first direction,
- wherein the dust remover comprises:
- a workpiece carrying unit for carrying the workpiece in the first direction;
- a brush rotation unit for rotating the brush around its axis in synchronization with the movement of the workpiece carrying unit;
- and
- a back-and-forth brush movement unit for moving the brush back and forth along the second direction in synchronization with the movement of the workpiece carrying unit,
- wherein the brush rotation unit includes:
- a motor as a drive source;
- and
- a power transmitter that transmits rotary force of the motor to the brush while allowing the brush to move back and forth;
- and wherein the back-and-forth brush movement unit includes:
- an actuator as a drive source;
- and
- a power transmitter that converts power of the actuator to a back-and-forth motion for the brush and transmits the back-and-forth motion to the brush while allowing the brush to rotate.
Dependencies are inferred from the claim text.