System and method for testing pattern sensitive algorithms for semiconductor design
AssigneeInternational Business Machines Corporation
InventorsDavid L. DeMaris, Timothy G. Dunham, William C. Leipold, Daniel N. Maynard, Michael E. Scaman, Shi Zhong
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Abstract
A system and method for generating test patterns for a pattern sensitive algorithm. The method comprises the steps extracting feature samples from a layout design; grouping feature samples into clusters; selecting at least one area from the layout design that covers a feature sample from each cluster; and saving each pattern layout covered by the at least one area as test patterns.
Claims10
A method for generating test patterns for a pattern sensitive algorithm, comprising:
- extracting feature samples from a layout design utilizing Walsh patterns and correlation with either Walsh patterns or low resolution Walsh transforms;
- grouping the extracted feature samples into clusters;
- selecting at least one area from the layout design that covers a feature sample from each cluster;
- and
- saving each pattern layout covered by the at least one area as a test pattern.
A method for processing patterns having been identified as creating flaws in a pattern sensitive algorithm, comprising:
- sampling patterns associated with flaws into a plurality of sampled patterns;
- grouping the plurality of sampled patterns into clusters such that location information and flaw severity are maintained;
- and
- sorting the plurality of sampled patterns by the flaw severity and cluster membership.
A method for generating test patterns for a pattern sensitive algorithm, comprising:
- extracting feature samples from a layout design;
- grouping the extracted feature samples into clusters utilizing an algorithm that includes a penalized objective function;
- selecting at least one area from the layout design that covers a feature sample from each cluster;
- and
- saving each pattern layout covered by the at least one area as a test pattern.
Dependencies are inferred from the claim text.