Method for manufacturing semiconductor device

A manufacturing method for a semiconductor device, comprising the steps of:

• selecting as a monitoring step, one step from a plurality of steps in a main body wafer manufacturing process for manufacturing a main body wafer on which the semiconductor device is formed, the monitoring step comprising BPSG densification in an interlayer insulating film formation step;
• selecting as a variation reduction step, one step from main body post-process steps succeeding the monitoring step;
• a monitor wafer manufacturing process for manufacturing a monitor wafer on which a monitor element is formed, the monitor wafer manufacturing process comprising a monitor pre-process step, the monitoring step, a quality check step of measuring a characteristic of the monitor element formed under the same condition as the main body wafer, and a condition setting step of setting a manufacturing condition in the variation reduction step based on a process influence measured in the quality check step;
• and
• performing the main body post-process step under the manufacturing condition set in the condition setting step.