US 7,350,544 B2 · Station for controlling and purging a mini-environment

Abstract

A SMIF type mini-environment (1) can be connected onto a purge station (2). The purge station comprises a leaktight purge compartment (2b) whose top face includes a closable transfer passage (2c) facing the bottom face (1b) of the mini-environment pod (1). An elevator (4) is suitable for vertically displacing the bottom wall (1b) of the mini-environment pod (1) when coupled thereto, simultaneously moving the stack (3) of substrate wafers carried by the bottom wall (1c) so as to introduce them together into the leaktight purge compartment (2b). The stack (3) of substrate wafers is then purged inside a leaktight purge compartment (2b) of the purge station (2), while simultaneously purging the mini-environment pod (1). This provides purging that is much more effective and much faster, thus encouraging the use of SMIF mini-environment pods in microelectronic processes.

Claims20

Dependent claims

A device for controlling and reducing contamination of a stack of disjoint substrate wafers in a mini-environment pod having a leakproof peripheral wall provided with a closable access passage for introducing and withdrawing the stack wherein the device further comprises a purge station in combination with said pod, said purge station comprising:

a leaktight purge compartment dimensioned to receive and contain the stack;
a closable transfer passage and means for selective leaktight coupling of the closable access passage to the closable transfer passage;
handler means for moving the stack between the mini-environment pod and the leaktight purge compartment;
diffuser means adapted to diffuse a purge gas laterally towards edges of the disjoint substrate wafers in the stack parallel to main faces thereof;
and
collector means disposed to collect the diffused flow of purge gas remote from the diffuser means after passing between the disjoint substrate wafers of the stack, wherein said stack is purged inside said leaktight purge environment while the mini-environment pod is simultaneously purged.

3 more elements

A device for controlling contamination of a stack of wafers in a pod having a leakproof peripheral wall with a closable access passage for introducing and withdrawing the stack, including a purge station in combination with said pod, said purge station comprising:

a leaktight purge compartment that receives and contains the stack;
a closable transfer passage and device that selectively and leaktight couples the closable access passage to the closable transfer passage;
a handler that moves the stack between the pod and the leaktight purge compartment;
a diffuser that diffuses a purge gas laterally towards edges of the wafers parallel to main faces thereof;
and
a collector that collects the diffused flow of purge gas remote from the diffuser after passing between the wafers, wherein said stack is purged inside said leaktight purge environment simultaneously with the pod.

3 more elements

Dependencies are inferred from the claim text.

Station for controlling and purging a mini-environment

Life of this patent

Station for controlling and purging a mini-environment

Life of this patent

Abstract

Claims20