Substrate supporting rod and substrate cassette using the same
AssigneeFoxsemicon Integrated Technology, Inc.
InventorsChun-Kai Huang, Wei-Cheng Tien
Life of this patent
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AssigneeFoxsemicon Integrated Technology, Inc.
InventorsChun-Kai Huang, Wei-Cheng Tien
Estimating the term…
A substrate-supporting rod (4) includes a resin body (41) and a metal rod (43). The resin body (41) includes a body portion (411) being cylinder-shaped and having a first through hole (413) in a direction of the axis thereof, and a number of shelves (415, 415′) arising from said body portion and extending in parallel away from said body portion at a predetermined pitch. The body portion and the number of shelves are unitary portions of the resin body. The metal rod is received in the first through hole. A projection (4151) is defined on the end of each of shelf to support a substrate (45). The projection is cylindrical in shape of which the diameter is larger than the thickness of the corresponding shelf, and a central axis thereof is substantially perpendicular to a central axis of the body portion.
A substrate-supporting rod to be assembled with a cassette frame for supporting substrates, the substrate-supporting rod comprising:
A cassette configured for supporting a substrate, comprising:
Dependencies are inferred from the claim text.