MEMS capacitive cantilever strain sensor, devices, and formation methods

A MEMS strain sensor, the sensor comprising:

• a first micro-scale plate;
• a second micro-scale plate bonded to said first micro-scale plate at one end and shaped by micro-fabrication to define a micro-scale separation from said first micro-scale plate at a distal end and over substantial opposing surfaces of said first and second micro-scale plates;
• a first metal layer carried on one of said opposing surfaces;
• a second metal layer carried on another one of said opposing surfaces;
• and
• a housing shaped to receive a surface subject to deflection under a strain load and alignedly attached to a selected one of the first and second micro-scale plates to communicate the deflection in relation to the strain load.

A MEMS strain sensor, the sensor comprising:

• opposing micro-scale plates, separated at a distal end and over at least a substantial portion of opposing surfaces of said micro-scale plates by a micro-scale gap;
• said opposing micro-scale plates being joined or unitary at another end opposite said distal end;
• capacitive plates carried on said opposing surfaces and electrically isolated from each other by said micro-scale gap;
• wherein one of said opposing plates is attached directly or eventually to a load applying member, said load applying member comprising a rod, said rod being joined to pedical screws for bearing load from said pedical screws.

A spinal support structure, comprising:

• pedical screws;
• a support rod connecting said pedical screws;
• a MEMS cantilever strain capacitive sensor attached to said rod to accept loading from said rod and produce variable capacitor response;
• a radio telemetry circuit for reading said variable capacitor response;
• and
• a biologically compatible housing houses said MEMS cantilever strain sensor and said radio telemetry circuit.

A spinal support structure, comprising:

• pedical screws;
• a support rod connecting said pedical screws;
• a MEMS cantilever strain sensor, comprising:
• opposing micro-scale plates, separated at a distal end and over at least a substantial portion of opposing surfaces of said micro-scale plates by a micro-scale gap,
• said opposing micro-scale plates being joined or unitary at another end opposite said distal end,
• capacitive plates carried on said opposing surfaces and electrically isolated from each other by said micro-scale gap,
• leads from each of said capacitive plates, and
• a circuit connected to said leads,
• the MEMS strain sensor being attached to said rod to accept loading from said rod and produce variable capacitor response;
• a radio telemetry circuit for reading said variable capacitor response;
• and
• a biologically compatible housing houses said MEMS cantilever strain sensor and said radio telemetry circuit.