Capacitive micro pressure sensing member and fingerprint sensor using the same

A fingerprint sensor, comprising:

• a sensor substrate;
• and
• a plurality of capacitive micro pressure sensing members arranged on a top surface of the sensor substrate to form a pressure sensing members array, wherein each of the capacitive micro pressure sensing members comprises:
• a member substrate;
• a first suspended structure located above the member substrate and including a suspended thin plate and at least one compliant suspension and connected to the suspended thin plate;
• a first protrusion structure arranged at a center portion of a top surface of the suspended thin plate;
• and
• a second suspended structure arranged on a top surface of the first protrusion structure with a center portion of the second suspended structure contacting the first protrusion structure, the second suspended structure covering the first suspended structure to form a sealed chamber together with the member substrate, wherein the suspended thin plate is movable in the sealed chamber relative to the member substrate so that a distance from the suspended thin plate to the member substrate is changed.