Determining metrology sampling decisions based on fabrication simulation
AssigneeAdvanced Micro Devices, Inc.
InventorsPeng Qu, Chandrashekar Krishnaswamy
Life of this patent
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Abstract
A method for determining metrology sampling rates for workpieces in a process flow includes determining a current status of the process flow. Future processing of the workpieces in the process flow is simulated based on the current status of the process flow over a predetermined time horizon to predict sampling rates for the workpieces. During the simulating, sampling rules are implemented that consider capacity constraints of a metrology resource in the process flow. Actual workpieces in the process flow are sampled based on the predicted metrology sampling rates.
Claims21
A method for determining metrology sampling rates for workpieces in a process flow, comprising:
- determining a current status of the process flow;
- simulating future processing of the workpieces in the process flow based on the current status of the process flow over a predetermined time horizon to predict metrology sampling rates for the workpieces;
- implementing sampling rules during the simulating that consider capacity constraints of a metrology resource in the process flow;
- and
- sampling actual workpieces in the process flow based on the predicted sampling rates to collect metrology data associated with the actual workpieces.
A system, comprising:
- a plurality of tools for processing workpieces in a process flow;
- and
- a sampling unit operable to determine a current status of the process flow, the sampling unit being further operable to employ a fabrication simulation model to simulate future processing of the workpieces in the process flow based on the current status of the process flow over a predetermined time horizon to predict metrology sampling rates for the workpieces and implement sampling rules during the simulating that consider capacity constraints of a metrology resource in the process flow;
- and
- a workflow controller operable to sample actual workpieces in the process flow based on the predicted metrology sampling rates.
A sampling controller comprising a processing device operable to execute instructions that when implemented perform a method, comprising:
- determining a current status of a process flow;
- simulating future processing of workpieces in the process flow based on the current status over a predetermined time horizon to predict sampling rates of the workpieces;
- implementing sampling rules during the simulating that consider capacity constraints of a metrology resource in the process flow;
- and
- communicating the predicted sampling rates to an entity operable to control the process flow.
Dependencies are inferred from the claim text.