Inter-process sensing of wafer outcome
AssigneeInficon GmbH
InventorsWilliam T. Conner, Craig Garvin, Steven J. Lakeman, Igor Tepermeister, Chenglong Yang
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Abstract
A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.
Claims14
A method for monitoring a microelectronic manufacturing process on a processing apparatus, the apparatus including at least one processing chamber a transfer chamber interconnected to said at least one processing chamber and a first valve connecting said at least one processing chamber and said transfer chamber, said first valve being opened when transfer to and from said at least one processing chamber is taking place, the method comprising the steps of:
- providing a monitoring sensor in relation to, but not directly within the at least one processing chamber;
- detecting whether said first valve is opened or closed;
- permitting the monitoring sensor to access the interior of said at least one processing chamber only if it has been detected that said first valve is opened;
- and
- monitoring the interior of said at least one processing chamber for at least one process related parameter wherein
- said apparatus further includes a sensor protection mechanism interconnecting said monitoring sensor to said first valve to selectively protect the monitoring sensor from the environment of the interior of said at least one processing chamber to indicate an outcome based on interprocess activity on a substrate.
A microelectronic processing apparatus comprising:
- a transfer chamber;
- at least one processing chamber interconnected to said transfer chamber by a first valve in which at least one processing substrate is transferred between the at least one processing chamber and the transfer chamber for various process operations;
- means for detecting whether said first valve is opened or closed;
- a sensor protecting mechanism for selectively protecting the monitoring sensor from the environment of said processing chamber;
- and
- a monitoring sensor selectively interconnected with but not disposed within the interior of the at least one processing chamber, wherein said sensor protection mechanism permits said monitoring sensor access to monitor the interior of said monitoring chamber only after said detecting means has detected that the first valve has been opened.
Dependencies are inferred from the claim text.