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US 7,253,975 B2Granted
Retainer, exposure apparatus, and device fabrication method
AssigneeCanon Kabushiki Kaisha
InventorYukio Takabayashi
Life of this patent
Estimating the term…
Abstract
A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.
Claims13
An optical apparatus comprising:
- an optical element having three substantially V-shaped first grooves;
- and
- a support configured to support said optical element kinematically, said support including three substantially spherical members configured to respectively contact said three substantially V-shaped first grooves and to support said optical element, and three substantially V-shaped second grooves configured to respectively contact said three substantially spherical members and to support said three substantially spherical members,
- wherein said apparatus is configured to allow each of said three substantially spherical members to roll along corresponding one of said three substantially V-shaped first grooves and to roll along corresponding one of said three substantially V-shaped second grooves.
1 more element
An optical apparatus comprising:
- an optical element having three substantially V-shaped first grooves respectively extending in radial directions of said optical element;
- and
- a support configured to support said optical element, said support including three substantially spherical members configured to respectively contact said three substantially V-shaped first grooves and to support said optical element, and three substantially V-shaped second grooves respectively extending in radial directions of said optical element and configured to respectively contact said three substantially spherical members and to support said three substantially spherical members.
Dependencies are inferred from the claim text.