Back to results
US 7,253,878 B2Granted
Exposure apparatus and device fabrication method
AssigneeCanon Kabushiki Kaisha
InventorYoshikazu Miyajima
Life of this patent
Estimating the term…
Abstract
An exposure apparatus includes a reflective element for reflecting and introducing light from a light source to a plate, at least one first driver for providing the reflective element with a force and/or a displacement in at least one directions, and at least one second driver for providing the reflective element with a force and/or a displacement in at least one directions, wherein the first and second drives are connected in series to each other.
Claims14
An exposure apparatus comprising:
- a projection optical system for introducing light from a pattern on an original form to a plate, said projection optical system having a mirror;
- and
- first and second drives configured to provide the mirror with a displacement,
- wherein said first and second drives are connected in series to each other, and a minimum unit of a displacement amount by said second drive is smaller than that by said first drive.
1 more element
An exposure apparatus comprising:
- a projection optical system for introducing light from a pattern on an original form to a plate, said projection optical system having a mirror;
- a support member configured to support the mirror;
- a barrel configured to support said support member;
- a first drive, connected to said barrel and support member, for providing the mirror with a displacement;
- and
- a second drive, connected to said support member and the mirror, for providing the mirror with a displacement,
- wherein said first and second drives are connected in series to each other, and a minimum unit of a displacement amount by said second drive is smaller than that by said first drive.
4 more elements
An exposure apparatus comprising:
- a projection optical system for introducing light from a pattern on an original form to a plate, said projection optical system having a mirror;
- a fine-motion drive configured to move said mirror;
- a first supporting member configured to support said mirror;
- and
- a rough-motion drive configured to move said first supporting member, wherein a moving range of said rough-motion drive is larger than that of said fine-motion drive.
2 more elements
Dependencies are inferred from the claim text.