Method of forming an in-situ recessed structure

A method of patterning a substrate, said method comprising:

• forming from an organic acrylate material, disposed on said substrate, a first film having an original pattern that includes a plurality of projections a subset of which extends from a nadir surface terminating in an apex surface defining a height therebetween, with a portion of said first film in superimposition with said nadir surface defining a nadir portion;
• removing said nadir portion to expose a region of said substrate in superimposition therewith, defining a plurality of recessions;
• disposing upon said first film a second material to form a second film having a surface spaced-apart from said apex surface of said plurality of projections and filling said plurality of recessions to form a multi-film stack;
• and
• removing said organic acrylate material and portions of said second material in superimposition therewith to leave a plurality of spaced-apart regions of said second material on said substrate.

A method of patterning a substrate, said method comprising:

• forming from an organic acrylate material, disposed on said substrate, a first film having an original pattern that includes a plurality of projections, a subset of which extends from a nadir surface terminating in an apex surface defining a height therebetween, with a portion of said first film in superimposition with said nadir surface defining a nadir portion;
• removing said nadir portion to expose a region of said substrate in superimposition therewith, defining a plurality of recessions;
• disposing upon said first film a second material to form a second film having a surface spaced-apart from said apex surface of said plurality of projections and filling said plurality of recessions to form a multi-film stack;
• removing volumes of said second film and portions of said projections to generate a crown surface that is substantially smooth and includes regions of said organic acrylate material separate by regions of said second material;
• and
• removing said organic acrylate material to leave a plurality of spaced-apart regions of said second material on said substrate.