MEMS device deflection stop
AssigneeTexas Instruments Incorporated
InventorsAnthony DiCarlo, Patrick I. Oden, Richard L. Knipe, Rabah Mezenner, James D. Huffman
Life of this patent
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Abstract
A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.
Claims15
A micromechanical device comprising:
- a substrate;
- a member disposed apart from the substrate and operable to deflect relative to said substrate about an axis;
- an intermediate layer disposed apart from said substrate and said member, said intermediate layer having at least one electrode and at least one spring tip operable to contact said member upon said deflection of said member;
- and
- wherein said electrode is located closer than said spring tip to a projection of said axis onto the plane of the intermediate layer.
A method of forming a micromirror device, the method comprising:
- providing a substrate;
- forming an intermediate layer disposed apart from said substrate
- forming a member disposed apart from the intermediate layer and said substrate and operable to deflect relative to said substrate about an axis;
- wherein forming an intermediate layer comprises forming said intermediate layer having at least one electrode and at least one spring tip operable to contact said member upon said deflection of said member;
- and
- wherein said electrode is formed closer than said spring tip to a projection of said axis onto the plane of the intermediate layer.
A display system comprising:
- a micromirror device comprising:
- a substrate;
- a member disposed apart from the substrate and operable to deflect relative to said substrate about an axis;
- an intermediate layer disposed apart from said substrate and said member, said intermediate layer having at least one electrode and at least one spring tip operable to contact said member upon said deflection of said member;
- and
- wherein said electrode is located closer than said spring tip to a projection of said axis onto the plane of the intermediate layer;
- a light source for providing a beam of light to illuminate said micromirror device, said micromirror device spatially modulating said beam of light such that said modulated beam of light forms an image on an image plane.
Dependencies are inferred from the claim text.