System and method for plasma plating
AssigneeBasic Resources, Inc.
InventorsJerry D. Kidd, Craig D. Harrington, Daniel N. Hopkins
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AssigneeBasic Resources, Inc.
InventorsJerry D. Kidd, Craig D. Harrington, Daniel N. Hopkins
Estimating the term…
An exemplary system and method for plasma plating are provided to generate a deposition layer on a substrate. The method for plasma plating includes positioning a substrate within a vacuum chamber, positioning a depositant in a filament within the vacuum chamber, reducing the pressure in the vacuum chamber to a level at or below 4 milliTorr, and introducing a gas into the vacuum chamber at a rate to raise the pressure in the vacuum chamber to a level at or between 0.1 milliTorr and 4 milliTorr. In other embodiments, the gas is not required to be introduced. The method also includes applying a dc signal to the substrate at a voltage amplitude at or between 1 volt and 5000 volts, applying a radio frequency signal to the substrate at a power level at or between 1 watt and 50 watts, and heating the depositant to a temperature at or above the melting point of the depositant to generate a plasma in the vacuum chamber. The plasma will preferably include both positively charged gas and depositant ions that will be attracted to the substrate, which will be provided at a negative potential if the dc signal is provided at a negative polarity.
A method for plasma plating comprising:
The method of 1, further comprising positioning the first evaporation source a distance from the second evaporation source.
The method of 37, wherein the total mass of the second depositant is 20 to 80 percent less than the total mass of the depositant.
The method of 38, wherein the total mass of the second depositant is 40 to 50 percent less than the total mass of the depositant.
A method for plasma plating comprising:
A method for plasma plating comprising:
Dependencies are inferred from the claim text.