US 7,248,975 B2 · Real time monitoring of particulate contamination in a wafer processing chamber

Abstract

An apparatus and method for use is described which permits real time monitoring of build-up of particulate contamination in a wafer processing chamber. The apparatus is capable of monitoring particle build up in regions of a processing chamber which are not accessible by traditional optical particle scanners. An accelerometer is fastened to a body in the chamber upon which particulates deposit. The body is subjected to vibrations and produces a vibration signal which is detected by the accelerometer. The signal is processed to form a frequency spectrum of vibration amplitudes. Frequencies in a selected band are directly proportional to the particulate build up on the body. The invention is applied to a wafer annealing tool with a rotatable platform wherein particles deposit on a support body under the wafer. The method and apparatus have been shown to be reliable and accurate as well as cost effective and easily implemented.

Claims16

Dependent claims

An apparatus for monitoring particulate build-up on a body enclosed in a chamber comprising:

(a) a body, enclosed in a chamber, having at least one region whereon particles, generated by at least one particle source within said chamber may deposit during a processing operation;
(b) an accelerometer securely fastened to said body and wherein said body is configured to minimize the mass thereof between said accelerometer and said at least one region;
(c) a source of vibration to said body;
(d) a signal conditioner connected to receive an analog signal from said accelerometer, pass said signal through an anti-aliasing filter, then through an analog-to-digital converter, to a programmable digital signal processing unit;
and
(e) at least one output device trigger-able by said digital signal processing unit.

3 more elements

A method for monitoring and signaling particle build-up in a processing chamber comprising:

a) providing a processing chamber having;
(i) a body enclosed therein;
(ii) at least one source of particulates in said chamber, said particulates capable of depositing on at least one region of said body;
(iii) an accelerometer securely fastened to said body and wherein said body is configured to minimize the mass thereof between said accelerometer and said at least one region;
(iv) a least one source of vibration to said body;
(v) a signal conditioner connected to receive an analog signal from said accelerometer, pass said signal through an anti-aliasing filter, then through an analog-to-digital converter, to;
(vi) a programmable digital signal processing unit;
and
(vii) at least one output device trigger-able by said digital signal processing unit;
b) operating said processing chamber whereby vibrations are induced in said body and particulates are deposited in at least one region thereon and whereby said accelerometer delivers an analog signal to said signal conditioner whereafter said signal is passed through said anti-aliasing filter and thereafter through said analog-to-digital converter which digitizes and delivers said signal to said digital signal processing unit wherein said signal is transformed from a time domain signal to a frequency domain signal, said signal processing unit further analyzing a portion thereof over a frequency band to produce a value of vibration amplitude;
and
c) said signal processing unit monitoring said value over time while continuously comparing said value to a preset value thereof, triggering an alarm when said value reaches or surpasses said preset value.

9 more elements

Dependencies are inferred from the claim text.

Real time monitoring of particulate contamination in a wafer processing chamber

Life of this patent

Real time monitoring of particulate contamination in a wafer processing chamber

Life of this patent

Abstract

Claims16