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US 7,248,939 B1Granted
Method and apparatus for multivariate fault detection and classification
AssigneeAdvanced Micro Devices, Inc.
InventorsKevin Andrew Chamness, Daniel Kadosh, Gregory A. Cherry, Jason Williams
Life of this patent
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Abstract
The present invention provides a method and apparatus for multivariate fault identification and classification. The method includes accessing data indicative of a plurality of physical parameters associated with a plurality of processed semiconductor wafers and providing at least one summary report including information indicative of at least one univariate representation of the accessed data and at least one multivariate representation of the accessed data.
Claims23
A method, comprising:
- accessing wafer electrical test data indicative of a plurality of electrical parameters associated with a plurality of structures formed on a plurality of processed semiconductor wafers;
- and
- providing at least one summary report including information indicative of at least one univariate representation of the accessed wafer electrical test data, at least one univariate limit, at least one multivariate representation of the accessed wafer electrical test data, and at least one multivariate limit, the summary report being provided using a graphical user interface.
An apparatus, comprising:
- a graphical user interface;
- a memory for storing wafer electrical test data indicative of a plurality of electrical parameters associated with a plurality of structures formed on a plurality of processed semiconductor wafers;
- and
- a summary report generator configured to:
- access said wafer electrical test data;
- and
- provide at least one summary report including information indicative of at least one univariate representation of the accessed wafer electrical test data, at least one univariate limit, at least one multivariate representation of the accessed wafer electrical test data, and at least one multivariate limit, the summary report being provided using the graphical user interface.
4 more elements
An apparatus, comprising:
- means for accessing wafer electrical test data indicative of a plurality of electrical parameters associated with a plurality of structures formed on a plurality of processed semiconductor wafers;
- means for providing at least one summary report including information indicative of at least one univariate representation of the accessed wafer electrical test data, at least one univariate limit, at least one multivariate representation of the accessed wafer electrical test data, and at least one multivariate limit, the summary report being provided using the graphical user interface.
Dependencies are inferred from the claim text.