Lithographic apparatus and patterning device transport

An apparatus for handling a patterning device and capable of cooperating with a box for transporting a patterning device, said transport box having a transport box channel system, said apparatus comprising:

• a support structure configured to support the patterning device;
• and
• a channel system configured to be coupled to the transport box channel system,
• wherein the transport box channel system is configured to evacuate gases from/to an inner space of the transport box and/or to feed gases to/from the inner space of the transport box.

A box for transporting a lithographic patterning device, the box comprising:

• a container part having an inner space with a storing position to store the patterning device and an opening for transferring the patterning device to and from the inner space;
• a closure part to close the opening;
• and
• a channel system configured to evacuate and/or feed gases from/to the inner space of the box, the channel system including an output channel connected to the inner space, the output channel connectable with an evacuating device that is external to the box and configured to evacuate gas from the inner space,
• wherein the box is arranged to cooperate with a lithographic apparatus for a transfer of the patterning device.

A box for transporting a lithographic patterning device, the box comprising:

• a container part having an inner space with a storing position to store the patterning device and an opening for transferring the patterning device to and from the inner space;
• a closure part to close the opening;
• and
• a channel system configured to evacuate and/or feed gases from/to the inner space of the box, the channel system including an input channel connected to the inner space, the output channel connectable with a feeding device that is external to the box and configured to feed gas into the inner space,
• wherein the box is arranged to cooperate with a lithographic apparatus for a transfer of the patterning device.