Optical targets
AssigneeHewlett-Packard Development Company, L.P.
InventorsSimon Dodd, Michael D. Miller, Joseph M. Torgerson
Life of this patent
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Abstract
An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer.
Claims16
An optical alignment target formed on a substrate, the target comprising:
- a planar central portion;
- and
- a contoured contrasting region that surrounds the planar central portion, the contoured contrasting region being formed from a first layer deposited on the substrate, a second layer deposited on the the first layer, and a third layer deposited on the second layer, the first layer having a topographic contour that forms patterned surface irregularities on an upper surface of the first layer, the second and third layers each having a topographic contour that generally mirrors the topographic contour of the first layer as a result of the second and third layers having been deposited on the first layer such that upper surfaces of the second and third layers have contours that follow contours of the upper surface of the first layer;
- wherein the optical alignment target can be readily detected from the contrast between the planar central portion and the contoured contrasting region that surrounds the planar central region.
A method of manufacture of a target, comprising:
- depositing a first layer on a substrate;
- forming a topographic contoured contrasting region on an upper surface of the first layer, the contoured contrasting region surrounding a planar central portion of the first layer and defining patterned surface irregularities;
- and
- depositing a second layer on the first layer, the second layer having a topographic contour in the contoured contrasting region that generally mirrors the topographic contour of the first layer as a result of the second layer having been deposited on the first layer, such that a portion of an upper surface of the second layer has contours that closely follow contours of the upper surface of the first layer, wherein the target can be readily detected from the contrast between the planar central portion and the contoured contrasting region that surrounds the planar central region.
A target formed on a substrate comprising:
- a first layer deposited below a second layer on the substrate, the second layer deposited below a third layer on the substrate, the first layer having the topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer;
- a barrier layer disposed above the second layer;
- and
- an orifice plate disposed above the barrier layer.
Dependencies are inferred from the claim text.