System for measurement of the height, angle and their variations of the surface of an object
AssigneeAcademia Sinica
InventorsIng-Shouh Hwang, En-Te Hu, Kuang-Yuh Huang
Life of this patent
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Abstract
A system for measurement of the height, angle and their variations of the surface of an object comprises a measurement module and an astigmatic optical path mechanism. The optical path mechanism makes a laser beam pass a lens assembly and focus on an object. The reflected light passes the lens assembly and an astigmatic lens, arriving at the photo sensor assembly, forming a light spot thereon. The translational displacements of the object are measured by the variations in shape of the light spot on the photo sensors. The angular displacements of the object are measured accordingly by the movement of the light spot on the photo sensors.
Claims13
A system for measurement of the height, angle and their variations of the surface of an object, comprising a measurement module and an optical path mechanism, wherein said optical path mechanism comprises:
- a light source, a light beam splitter, an objective lens assembly, an astigmatic lens and a photo sensor assembly comprising a plurality of photo sensors distributed substantially in a plane;
- wherein said optical path mechanism is so arranged that a light beam generated by said light source passes through said light beam splitter and projects through said objective lens assembly to surface of an object adjacent to focus of said objective lens assembly, forming a light spot thereon and that said light beam reflects from said object surface, passes through said objective lens assembly, said light beam splitter and said astigmatic lens and projects to said photo sensor assembly, forming another light spot thereon;
- and
- wherein said measurement module calculates relative height, angle and their variations of said light spot on said object according to output signals of respective photo sensors of said photo sensor assembly.
Dependencies are inferred from the claim text.