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US 7,247,819 B2Granted
Substrate heating apparatus
AssigneeNGK Insulators, Ltd.
InventorsYoshinobu Goto, Hideyoshi Tsuruta
Life of this patent
Estimating the term…
Abstract
A substrate heating apparatus is provided, including a base group including a plurality of bases, which are arranged substantially into a plate with a gap interposed between the bases, and which form a substrate mounting surface. A resistance heating element provided for at least one of the bases.
Claims19
A substrate heating apparatus, comprising:
- a base group including a plurality of bases, which are arranged into substantially a plate with a gap interposed between the bases and form a substrate mounting surface;
- a resistance heating element provided for at least one of the bases;
- a plate-shaped auxiliary member, comprising an insulator, arranged in contact with a surface of the base group opposing the substrate mounting surface;
- and
- a power feeder, which is connected to a terminal of the resistance heating element and is wired between the base group and the auxiliary member.
2 more elements
A substrate heating apparatus, comprising:
- a base group including a plurality of bases, which are arranged into substantially a plate with a gap interposed between the bases and form a substrate mounting surface;
- a resistance heating element provided for at least one of the bases;
- a tubular member directly or indirectly connected to a central part of a surface of the base group opposing the substrate mounting surface;
- and
- a plate-shaped auxiliary member arranged in contact with the surface of the base group opposing the substrate mounting surface, wherein the auxiliary member is interposed between the base group and the tubular member.
2 more elements
A substrate heating apparatus, comprising:
- a base group including a plurality of bases, which are arranged into substantially a plate with a gap interposed between the bases and form a substrate mounting surface;
- a resistance heating element provided for at least one of the bases;
- a tubular member directly or indirectly connected to a central part of a surface of the base group opposing the substrate mounting surface;
- and
- a plate-shaped auxiliary member arranged in contact with the surface of the base group opposing the substrate mounting surface, wherein the auxiliary member is interposed between the base group and the tubular member, and wherein the auxiliary member and the tubular member comprise an integrated ceramic sintered body.
2 more elements
Dependencies are inferred from the claim text.