Back to results
US 7,247,818 B2Granted
Substrate heating apparatus and manufacturing method for the same
AssigneeNGK Insulators, Ltd.
InventorsNobuyuki Kondou, Hideyoshi Tsuruta
Life of this patent
Estimating the term…
Abstract
A substrate heating apparatus includes a ceramic base having a concave heating surface on which a substrate is placed, and a resistance heating element buried in the ceramic base. The central part of the concave heating surface defines the lowest point of the heating surface and the peripheral part of the concave heating surface defines the highest point of the heating surface.
Claims10
A substrate heating apparatus comprising:
- a ceramic base including a concave heating surface on which a substrate is placed, wherein a central part of the concave heating surface defines a lowermost point of the concave heating surface and a peripheral part of the concave heating surface defines on uppermost point of the concave heating surface;
- and
- a resistance heating element buried in the ceramic base;
- wherein a height difference ΔH between a height (Hc) of the central part of the concave heating surface and a height (He) of the peripheral part of the concave heating surface is in a range of 10 μm to less than 50 μm.
1 more element
Dependencies are inferred from the claim text.