Alignment apparatus and exposure apparatus using the same
AssigneeCanon Kabushiki Kaisha
InventorNobushige Korenaga
Life of this patent
Estimating the term…
Abstract
An alignment apparatus which generates a driving force between a plate-like movable element and a stator facing the movable element to control alignment of the movable element. The apparatus includes movable element magnets which are arrayed in a plate-like plane of the movable element in accordance with an array cycle and are magnetized in predetermined directions, stator coils which are arrayed at intervals corresponding to the array cycle, and a current controller which supplies control currents having phase differences to each pair of adjacent ones of said stator coils to generate a driving force for driving the movable element between the movable element magnets and the stator coils facing the movable element magnets.
Claims7
An alignment apparatus which generates a driving force between a movable element and a stator facing the movable element to align the movable element, said apparatus comprising:
- magnet units which are two-dimensionally formed on the movable element and comprise a plurality of permanent magnets arrayed in accordance with an array cycle;
- and
- poly-phase coils which are formed on the stator and are arrayed at intervals corresponding to the array cycle,
- wherein said poly-phase coils comprise first coils which have linear portions extended in a first direction,
- each length of the linear portions of the first coils is longer than each length of the magnet units in the first direction, and
- the number of permanent magnets facing each of the linear portions of coils having the same phase among the first coils is equal in each of said magnet units.
An alignment apparatus which generates a driving force between a movable element and a stator facing the movable element to align the movable element, said apparatus comprising:
- magnet units which are two-dimensionally formed on the movable element and comprise a plurality of permanent magnets arrayed in accordance with an array cycle;
- and
- poly-phase coils which are formed on the stator and are arrayed at intervals corresponding to the array cycle,
- wherein said poly-phase coils comprise first coils which have linear portions extended in a first direction,
- each length of the linear portions of the first coils being longer than the sum of a length of said movable element in the first direction and a movement stroke of said movable element in the first direction, and
- the number of permanent magnets facing each of the linear portions of coils having the same phase among the first coils is equal in each of said magnet units.
Dependencies are inferred from the claim text.