Refractive projection objective
AssigneeCarl Zeiss SMT GmbH
InventorsHans-Juergen Rostalski, Karl-Heinz Schuster, Russell Hudyma, Wilhelm Ulrich, Rolf Freimann
Life of this patent
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Abstract
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D1/D2<1.1.
Claims57
A refractive projection objective for microlithography with a numerical aperture NA greater than 0.7, consisting of:
- a first lens group immediately following an object plane of the projection objective and having negative refractive power;
- a second lens group immediately following the first lens group and having positive refractive power;
- a third lens group immediately following the second lens group and having negative refractive power for generating a constriction of a light beam passing through the projection objective;
- a fourth lens group immediately following the third lens group and having positive refractive power;
- and
- a fifth lens group immediately following the fourth lens group and having positive refractive power;
- the projection objective thereby consisting of a first convexity, a second convexity, and a waist arranged between the first and second convexity, wherein
- the first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and
- 0.8<D1/D2<1.1.
A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, a second lens group with positive refractive power, a third lens group with negative refractive power, for the provision of a constriction of the light beam, a following fourth lens group with positive refractive power, and a system diaphragm with a following fifth lens group, which has positive refractive power,
- wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged, and
- wherein the fourth lens group includes at least one negative lens having an image-side concave surface.
A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, a second lens group with positive refractive power, a third lens group with negative refractive power, for the provision of a constriction of the light beam, a following fourth lens group with positive refractive power, and a system diaphragm with a following fifth lens group, which has positive refractive power,
- wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged, and,
- wherein the fourth lens group includes at least one plano-concave lens having an object-side plane surface and an image-side concave surface.
A refractive projection objective which, in the direction of propagation of the light, consists of a first lens group with negative refractive power, a second lens group with positive refractive power, a third lens group with negative refractive power, for the provision of a constriction of the light beam, a following fourth lens group with positive refractive power, and a system diaphragm with a following fifth lens group, which has positive refractive power,
- wherein before the diaphragm and after the diaphragm a respective meniscus lens curved toward the object is arranged, and,
- wherein the fourth lens group includes at least one negative meniscus lens having an image-side concave surface.
A refractive projection objective for projecting a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of ultraviolet light of a prescribed operating wavelength at an image side numerical aperture NA>0.7 comprising:
- a first lens group immediately following the object plane and having negative refractive power;
- a second lens group immediately following the first lens group and having positive refractive power;
- a third lens group immediately following the second lens group and having negative refractive power for generating a waist;
- a fourth lens group immediately following the third lens group and having positive refractive power;
- a fifth lens group immediately following the fourth lens group and having positive refractive power;
- and
- a system diaphragm arranged between the fourth and the fifth lens group at a distance in front of the image plane;
- wherein a meniscus lens curved toward the object plane is arranged immediately before the system diaphragm and a meniscus lens curved toward the object plane is arranged immediately after the system diaphragm;
- wherein a negative group having an effective curvature with a concave side directed towards the image plane is arranged in a region of divergent radiation between the waist and the system diaphragm, and
- wherein the negative group comprises exactly two lenses with negative refractive power and concave surfaces each directed towards the image.
A refractive projection objective for projecting a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the aid of ultraviolet light of a prescribed operating wavelength at an image side numerical aperture NA>0.7 comprising:
- a first lens group immediately following the object plane and having negative refractive power;
- a second lens group immediately following the first lens group and having positive refractive power;
- a third lens group immediately following the second lens group and having negative refractive power for generating a place of narrowest constriction of a light beam passing through the projection objective;
- a fourth lens group immediately following the third lens group and having positive refractive power;
- a fifth lens group immediately following the fourth lens group and having positive refractive power;
- and
- a system diaphragm arranged between the fourth and the fifth lens group at a distance in front of the image plane;
- wherein two meniscus lenses with convex surfaces turned toward each other are arranged after the place of narrowest constriction and before the system diaphragm;
- wherein a negative group having an effective curvature with a concave side directed towards the image plane is arranged in a region of divergent radiation between the place of narrowest constriction and the system diaphragm, and
- wherein the negative group comprises exactly two lenses with negative refractive power and concave surfaces each directed towards the image.
Dependencies are inferred from the claim text.