Method and system for packaging a MEMS device
AssigneeIdc, LLC
InventorsMark W. Miles, Jeffrey B. Sampsell, Lauren Palmateer, Brian W. Arbuckle, Philip D. Floyd
Life of this patent
Estimating the term…
Abstract
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
Claims29
A display, comprising:
- a transparent substrate;
- an array of interferometric modulators configured to reflect light through said transparent substrate;
- a backplate sealed to said transparent substrate and providing a cavity for said interferometric modulators;
- and
- electronic circuitry located on said backplate and in electrical connection with the array of interferometric modulators.
A device having a display, comprising:
- a transparent substrate;
- an array of interferometric modulators configured to reflect light through said transparent substrate;
- and
- a backplate sealed to said transparent substrate and providing a cavity for said interferometric modulators, wherein said backplate comprises electronic circuitry configured to control said interferometric modulators.
A method of manufacturing a display device, comprising:
- providing a transparent substrate comprising an array of interferometric modulators;
- providing a backplate comprising electronic circuitry configured to control said array of interferometric modulators;
- sealing said transparent substrate to said backplate so that a cavity is formed above said array of interferometric modulators, and wherein said electronic circuitry is placed in electrical communication with said array of interferometric modulators.
A display, the process of manufacturing said display comprising:
- providing a transparent substrate comprising an array of interferometric modulators;
- providing a backplate comprising electronic circuitry configured to control said array of interferometric modulators;
- sealing said transparent substrate to said backplate so that a cavity is formed above said array of interferometric modulators, and wherein said electronic circuitry is placed in electrical communication with said array of interferometric modulators.
A display, comprising:
- means for modulating light and reflecting it towards a viewer;
- means for supporting said modulating means;
- electronic circuitry configured to control the state of said modulating means;
- means for protecting said modulating means and providing a cavity for said modulating means, wherein said protecting means supports said electronic circuitry.
Dependencies are inferred from the claim text.