Method and apparatus for calibrating degradable components using process state data

A method, comprising:

• providing a tool comprised of at least one process chamber;
• providing at least one process state sensor that is adapted to obtain process state data regarding at least one characteristic of a process environment established in said chamber in performance of a process operation;
• providing a controller that is adapted to access said process state data;
• operatively coupling at least one of a new or repaired degradable component to said tool;
• and
• wherein said controller performs the step of calibrating said new or repaired degradable component based upon said process state data.

A method, comprising:

• providing a tool comprised of at least one process chamber;
• providing at least one process state sensor that is adapted to obtain process state data regarding at least one characteristic of a process environment established in said chamber in performance of a process operation;
• providing a controller that is adapted to access said process state data;
• operatively coupling at least one of a new or repaired degradable component to said tool, said at least one of a new or repaired degradable component having an initial calibration;
• and
• wherein said controller performs the step of confirming that said initial calibration of said new or repaired degradable component is correct based upon said process state data.