Fabrication monitoring system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChin-Cheng Pan, Chao-Fan Chang, Pai-Cheng Huang, Oliver Wu
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChin-Cheng Pan, Chao-Fan Chang, Pai-Cheng Huang, Oliver Wu
Estimating the term…
System and method for monitoring a fabrication process. Generally, an actual-to-planned variance is calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the planned quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site. Furthermore, a planned-to-actual variance may be calculated by determining a daily part index as a percentage of the delta between the planned quantity and the actual quantity over the actual quantity. A weekly part index is calculated by averaging the daily part index over a predetermined time period. From the weekly part index, a site index is determined that takes into account products fabricated at a particular site.
A method of monitoring fabrication performance, the method comprising:
A method of monitoring fabrication performance, the method comprising:
A computer program product for providing a method of monitoring fabrication performance, the computer program product having a medium with a computer program embodied thereon, the computer program comprising
A computer program product for providing a method of monitoring fabrication performance, the computer program product having a medium with a computer program embodied thereon, the computer program comprising
Dependencies are inferred from the claim text.