Method of producing conductive or semiconducting structured polymers
AssigneeInfineon Technologies AG
InventorKlaus Elian
Life of this patent
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Abstract
A photoresist layer is applied to the surface of a substrate. The photoresist layer is exposed and then developed, to form a structured polymer. A solution is then applied to the structured polymer that contains at least one organic electrically conductive compound. The structured polymer is converted into a conducting or semiconducting structured polymer.
Claims18
A method of producing a structured conductive polymer, which comprises the following method steps:
- a) providing a substrate;
- b) applying a photoresist layer to the substrate;
- c) exposing and developing the photoresist layer to produce a structured polymer;
- d) applying a solution containing at least one organic, intrinsic electrically conductive compound to the structured polymer for chemically modifying the structured polymer;
- and
- e) additionally in a further step rendering the structured polymer electrically conductive only on its surface or also in its interior.
A method of producing a structured conductive or semiconducting polymer, which comprises the following method steps:
- a) providing a substrate;
- b) applying an electrically insulating photoresist layer to the substrate;
- c) exposing and developing the photoresist layer to produce a structured polymer;
- d) applying a solution containing an organic intrinsic semiconducting or conducting compound to the structured polymer, the organic intrinsic semiconducting or conducting compound chemically reacting with the structured polymer;
- and
- e) additionally in a further step rendering the structured polymer semiconducting or electrically conductive only on its surface or also in its interior.
A method of producing a structured conductive or semiconducting polymer, which comprises the following method steps:
- a) providing a substrate;
- b) applying a photoresist layer to the substrate;
- c) exposing and developing the photoresist layer to produce a structured polymer;
- d) applying a solution containing at least one organic, intrinsic electrically conductive or semiconducting compound to the structured polymer for chemically modifying the structured polymer on its surface;
- and
- e) additionally in a further step rendering the surface of the structured polymer electrically conductive or semiconducting.
A method of producing a structured conductive or semiconducting polymer, which comprises the following method steps:
- a) providing a substrate;
- b) applying a photoresist layer to the substrate;
- c) exposing and developing the photoresist layer to produce a structured polymer;
- d) applying a solution containing at least one organic, intrinsic electrically conductive or semiconducting compound to the structured polymer for chemically modifying the structured polymer on its surface and in its interior;
- and
- e) additionally in a further step rendering the surface and the interior of the structured polymer electrically conductive or semiconducting.
A method of producing a structured conductive polymer, which comprises the following method steps:
- a) providing a substrate;
- b) applying a photoresist layer to the substrate;
- c) exposing and developing the photoresist layer to produce a structured polymer;
- d) applying a solution containing at least one intrinsic electrically conductive compound to the structured polymer for chemically modifying the structured polymer;
- and
- e)additionally in a further step rendering the structured polymer electrically conductive only on its surface or also in its interior by oxidizing or reducing the intrinsic electrically conductive compound.
Dependencies are inferred from the claim text.