Exposure apparatus including a non-contact utilities transfer assembly

Abstract

An apparatus (10) for positioning a device (228) includes a stage assembly (218) and a first transfer device (268A). The stage assembly (218) positions the device (228) and includes a device stage (250) that retains the device (228). The stage assembly (218) positions the device (228) in a work area (238) and a transfer area (240). The transfer device (268A) transfers a first utility to or from the device stage (250) in a non-contact fashion when the device stage (250) is in the transfer area (240) and does not transfer the first utility to or from the device stage (250) when the device stage (250) is in the work area (238). The first utility can be electrical power and/or electrical signals. Additionally, the apparatus (10) can include a loader (242) that loads the device (228) onto the device stage (250) when the device stage (250) is in the transfer area (240).

Dependencies are inferred from the claim text.