Fuse layout and method trimming
AssigneeOki Electric Industry Co., Ltd.
InventorKatushiko Hisaka
Life of this patent
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Abstract
A fuse layout (10) constructed of a wiring electrode made of a barrier metal layer of a high melting point and a main wiring metal layer comprises a plurality of fusion-type fuse sections (11 and 12) connected to each other in series and a plurality of fuse pads (13, 14, and 15) for drawing current to the respective fuse sections. If only one of the fuse sections is cut, the whole fuse layout is put in the “cut condition” so that the total fraction defective of incomplete cut of the fuse layout is largely reduced. Even if the barrier metal layer is not cut to remain, it has a high resistance so that the fuse resistance of the whole fuse layout becomes very high and the fuse layout is considered in the “cut condition”.
Claims14
A fuse layout formed of a wiring electrode made of a barrier metal layer of a high melting point and a main wiring metal layer, said fuse layout comprising:
- a single conductive path connected between two nodes;
- a plurality of fuse sections connected to each other in series and arranged in the single conductive path, said fuse sections being formed on a substrate of a semiconductor device;
- and
- a plurality of fuse pads electrically connected to the fuse sections alternately in series for drawing current to respective fuse sections, the plurality of fuse pads including at least one fuse pad electrically connected only to the conductive path.
A fuse layout comprising:
- a first node formed on a substrate of a semiconductor device;
- a second node formed on the substrate of the semiconductor device;
- a single conductive path connected between the first node and the second node;
- a first fuse section having two first end portions arranged in the single conductive path;
- a second fuse section having two second end portions arranged in the single conductive path, one of said two second end portions being connected to one of the two first end portions so that the first fuse section and the second fuse section are connected in series;
- a first fuse pad electrically connected to the other of the two first end portions;
- a second fuse pad disposed between the first fuse section and the second fuse section such that the second fuse pad is electrically connected to the one of the two first end portions and the one of the two second end portions;
- and
- a third fuse pad electrically connected to the other of the two second end portions.
Dependencies are inferred from the claim text.