Ferroelectric capacitor devices and a method for compensating for damage to a capacitor caused by etching

A method for compensating for damage to a vertical capacitor caused by etching one or more exposed faces of a ferroelectric layer of the vertical capacitor, the vertical capacitor comprising of a first and second electrode with said ferroelectric layer located between said first and second electrode, the method comprising the steps of:

• depositing a seeding layer of ferroelectric material on said one or more exposed faces of said ferroelectric layer, the seeding layer comprising at least one element removed from the ferroelectric layer by said etching and being arranged to be provide the faces of the ferroelectric layer with said at least one element and to transform the phase of the faces of the ferroelectric layer from amorphous to crystalline;
• depositing said first electrode on said seeding layer, said electrode being made of conductive material;
• and
• applying an oxygen annealing recovery process to said capacitor wherein during said oxygen annealing recovery process and said seeding layer compensates for etching damage in said ferroelectric layer.