Diffractometer
AssigneePANalytical B.V.
InventorsKlaus Lischka, Alexander Kharchenko
Life of this patent
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Abstract
A monochromator 4 is used to direct X-rays from X-ray source 2 onto a sample 14 as a convergent beam. The sample 14 is in a growth chamber. The sample is rotated, and diffraction measurements are made in parallel with multichannel detector 22. A specific reflection is used so that the intensity against angle graph measured in the multichannel detector gives information about the vertical lattice parameter. To compensate for wobble inevitably introduced by the rotation of the sample, short time measurements are made and summed.
Claims13
An X-ray diffraction system, comprising:
- an X-ray source (2) for emitting X-rays;
- a rotating sample stage (12) for mounting a sample;
- control electronics for determining the rotation period of the sample stage;
- a Johansson monochromator (4) for directing the X-rays emitted by the X-ray source as a convergent monochromatic beam (26) defining a range of convergent incident angles onto the sample;
- a multichannel X-ray detector (22) arranged to make a plurality of sets of measurements of intensity with a measurement time tm, each set of measurements of intensity being a set of measurements of intensity of X-rays diffracted by the sample at a plurality of diffraction angles (ε), for making measurements of intensity with a measurement time tm determined by the control electronics at
- t
- m
- <
- t
- r
- 4
- where tr is the rotation period of the sample stage;
- and
- a measurement system (24) for combining a plurality of the sets of measurements of intensity against diffraction angle by identifying the maximum in each set of measurements, and summing the sets of measurements together with the maxima aligned, the measurement system controlled by the control electronics.
A deposition system with an X-ray diffraction apparatus, comprising:
- a growth chamber;
- a rotating sample stage in the growth chamber for mounting a sample;
- a first X-ray window in the growth chamber;
- a second X-ray window in the growth chamber;
- a line X-ray source for emitting X-rays;
- a Johansson monochromator for directing the X-rays emitted by the line X-ray source as a convergent monochromatic beam onto the sample through the first X-ray window at a range of incident angles between the beam and the sample;
- a multichannel X-ray detector for measuring X-rays diffracted by the sample through the second X-ray window, at a plurality of diffraction angles between the diffracted X-rays and the sample;
- wherein the incident angles are greater than 45° and the diffraction angles less than 30°;
- and a measurement system for combining a plurality of measurements of intensity against diffraction angle by identifying the maximum in each set of measurements, and summing the measurements together with the maxima aligned.
A method of measuring an X-ray diffraction pattern in a growth chamber, including:
- mounting a sample on a sample stage in a growth chamber;
- rotating the sample stage to have a rotation period tr;
- directing X-rays emitted by a line X-ray source as a convergent monochromatic beam onto the sample through a first X-ray window in the growth chamber at a range of incident angles to the plane of the sample;
- measuring X-rays diffracted by the sample at a plurality of diffraction angles between diffracted X-rays and the sample passing through a second X-ray window in the growth chamber using a multichannel detector, wherein the measurement time tm of each of the plurality of measurements is given by
- t
- m
- <
- t
- r
- 4
- .
- and
- combining a plurality of measurements of intensity against diffraction angle by identifying the maximum in each set of measurements, and summing the measurements together with the maxima aligned.
Dependencies are inferred from the claim text.