US 7,116,125 B2 · Semiconductor test device using leakage current and compensation system of leakage current

Abstract

The present invention relates to a semiconductor test device which may use a leakage current and/or a compensation system of leakage current. The semiconductor test device, according to exemplary embodiments of the present invention, may include MOS transistors which may be fabricated in processes similar to those of the semiconductor device. The semiconductor test device may sense the leakage currents which may flow in the MOS transistors, may test whether the semiconductor device may be fabricated normally or abnormally, and may generate at least a normal or abnormal signal as a result. The leakage current compensation device may compensate for the leakage current which may flow in the semiconductor device in response to the normal or abnormal signal of the semiconductor test device. According to exemplary embodiments of the present invention, abnormally-fabricated MOS transistors may be tested and malfunctions of the semiconductor device may be reduced by the leakage current compensation device.

Claims13

Dependent claims

A semiconductor test device for testing a semiconductor device including at least one MOS transistor, comprising:

a first leakage current source generating a first leakage current according to whether the at least one MOS transistor is fabricated normally;
a second leakage current source generating a second leakage current according to whether the at least one MOS transistors is fabricated normally;
and
a comparator for comparing the first leakage current with the second leakage current to determine whether the semiconductor device is fabricated normally;
wherein
if the comparator determines that the first leakage current is smaller than the second leakage current, the at least one MOS transistor is fabricated normally, and if the first leakage current is larger than the second leakage current, the at least one MOS transistor is fabricated abnormally.

3 more elements

Dependencies are inferred from the claim text.

Semiconductor test device using leakage current and compensation system of leakage current

Life of this patent

Semiconductor test device using leakage current and compensation system of leakage current

Life of this patent

Abstract

Claims13