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US 7,115,863 B1Granted
Probe for scanning probe lithography and making method thereof
AssigneeHitachi, Ltd.
InventorsMasayoshi Ishibashi, Tomihiro Hashizume, Hiroshi Kajiyama
Life of this patent
Estimating the term…
Abstract
A probe of scanning probe lithography which provides a long time of useful life. The probe has a tip part comprising a conductor and an insulator, the insulator is formed to cover the conductor, and the conductor is formed to provide a substantially uniform cross-sectional configuration with respect to a surface to be patterned through scanning.
Claims11
A probe for scanning probe lithography, comprising:
- a lever spring, at one end of which a supporting part is fabricated, and at the other end of which a tip part is fabricated;
- a conductive layer which is fabricated on one side of said lever spring and said tip part;
- and
- a conductive fine needle which is fabricated at the apex of said tip part and is surrounded by an insulator, wherein one end of said fine needle is connected to said conductive layer and the other end of said fine needle is not covered with said insulator;
- wherein the cross-sectional diameter of said conductive fine needle is substantially uniform along the axial direction, and the cross-sectional diameter of said insulator surrounding said conductive fine needle increases in size in a direction extending away from said other end of said fine needle.
2 more elements
A probe for scanning probe lithography, comprising:
- a lever spring, at one end of which a supporting part is fabricated, and at the other end of which a tip part is fabricated;
- a conductive layer which is fabricated on one side of said lever spring and said tip part;
- a bending-correction layer having a predetermined thickness on said conductive layer;
- and
- a conductive fine needle which is fabricated at the apex of said tip part and is surrounded by an insulator, wherein one end of said fine needle is connected to said conductive layer and the other end of said fine needle is not covered with said insulator;
- wherein the cross section of said fine needle has effectively the same diameter along the axial direction, and the cross section of said insulator increases in size in the direction of said lever spring,
- wherein said probe is fabricated by the following steps of:
- preparing a silicon substrate having a predetermined crystal orientation, and opening a predetermined hole therein;
- forming an insulator layer having a predetermined thickness on said substrate;
- opening, at the center of a hole shape arranged on said insulator layer, a pit having a predetermined configuration which extends from the surface of said insulator layer to said silicon substrate;
- forming a conductive layer having a predetermined thickness on said insulator layer, and forming said conductive fine needle in said tip;
- forming a vending-correction layer having a predetermined thickness on said conductive layer;
- carrying out configuration processing of said lever spring which is formed of said silicon substrate, and which is formed of said insulator layer, said conductive layer, said vending-correction layer and said tip part;
- forming said supporting part on said lever spring at the other end of the tip part;
- and
- removing said silicon substrate from said lever spring.
13 more elements
A probe for scanning probe lithography, comprising:
- a lever spring, at one end of which a supporting part is fabricated, and at other end of which a tip part is fabricated;
- a conductive layer which is fabricated on one side of said lever spring and said tip part;
- and
- a conductive fine needle which is fabricated at the apex of said tip part and is surrounded by an insulator, wherein one end of said fine needle is connected to said conductive layer and the other end of said fine needle is not covered with said insulator;
- wherein the cross section of said fine needle has effectively the same diameter along the axial direction, and the cross section of said insulator increases in size towards the direction of said lever spring,
- wherein said probe is fabricated by the following steps of:
- preparing a silicon substrate having a predetermined crystal orientation, and opening a predetermined hole therein;
- forming a conductive hydrogenated carbon film having a predetermined thickness on said substrate;
- forming a hard-mask layer on the conductive carbon hydride film and removing the hard-mask layer except the center part of said hole portion, the diameter of which is approximately the same as the diameter of said fine needle;
- irradiating an X-ray beam to the conductive carbon hydride film from above the substrate so that the conductive carbon hydride film is changed to an insulating diamond layer except said center part;
- removing the hard-mask layer of the center part;
- forming a conductive layer having a predetermined thickness on the insulating diamond layer and the conductive carbon hydride film of the center part;
- carrying out configuration processing of said lever spring which is formed on said silicon substrate, and which is formed on said insulator, insulating diamond, said conductive layer, and said tip part;
- forming said supporting part on said lever spring at the other end of the tip part;
- and
- removing said silicon substrate from said lever spring.
13 more elements
A probe for scanning probe lithography, comprising:
- a lever spring, at one end of which a supporting part is fabricated, and at the other end of which a tip part is fabricated;
- a conductive layer which is fabricated on one side of said lever spring and said tip part;
- and
- a conductive fine thin plate which is fabricated at said tip part and is put between insulators, wherein one end of said fine thin plate is connected to said conductive layer and the other end of said thin plate is not covered with said insulator;
- wherein the cross section of said thin plate has substantially the same width in the direction of said lever spring, and the cross section of said insulator increases in size towards the direction of said lever spring.
2 more elements
Dependencies are inferred from the claim text.