Method for processing wafer
AssigneeDisco Corporation
InventorKarl Heinz Priewasser
Life of this patent
Estimating the term…
Abstract
To facilitate handling a wafer during processing even when the wafer is formed thin, a protective member is stuck through an adhesive agent to an outer-peripheral surplus region of a front surface of the wafer, the region being formed with no individual devices, and a back surface of the wafer is ground in a state where the whole front surface of the wafer is supported by the protective member. Since an outer periphery of the wafer is reinforced by the protective member, the wafer can be easily handled even after having been thinned by the grinding.
Claims4
A method for processing a wafer whose front surface includes a device region formed with a plurality of devices, and an outer-peripheral surplus region surrounding the device region, comprising at least:
- sticking a protective member to the outer-peripheral surplus region through an adhesive agent;
- and
- grinding a back surface of the wafer with the protective member held on a chuck table of a grinding apparatus and, subsequently, forming a film on the back surface of the wafer bearing the protective member stuck to the front surface;
- cutting the protective member by applying a cutting blade to the protective member and while the protective member and the cutting blade are being relatively rotated, so that the protective member stuck to the outer-peripheral surplus region may remain in a ring shape;
- and
- removing the part of the protective member covering the device region cut in said cutting of the protective-member to expose the device region, and electrically testing the devices.
Dependencies are inferred from the claim text.