Method for manufacturing semiconductor device

A method for manufacturing a semiconductor device, comprising:

• determining a first processing condition to apply a predetermined processing to a base body in a reaction chamber of a semiconductor device manufacturing apparatus on the basis of processing information including a processing condition, the base body being submitted to a process of the semiconductor device;
• processing the base body according to the determined first processing condition;
• measuring one or more process parameters which vary a processing capability of the process on the base body during the processing;
• determining a second processing condition during the processing so that a processing amount may be a set value, from a processing capability information, the measured process parameters, analysis measured values of the measured process parameters, and a reference state representing a relation between the processing capability information and the analysis measured values;
• and
• changing the processing condition from the first processing condition to the second processing condition during the processing and performing the processing based on the second processing condition, in a case where the second processing condition is different from the first processing condition.