Common-path point-diffraction phase-shifting interferometer
AssigneeInterphase Technologies, Inc.
InventorWilliam J. Cottrell
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AssigneeInterphase Technologies, Inc.
InventorWilliam J. Cottrell
Estimating the term…
A common-path, point-diffraction, phase-shifting interferometer uses a half wave plate having a diffractive element, such as pin hole. A coherent, polarized light source simultaneously generates a reference beam from the diffractive element and an object beam from remaining portions of the light going through the half wave plate. The reference beam has a nearly spherical wavefront. Each of the two beams possesses a different polarization state. The object and reference beams are then independently phase modulated by a polarization sensitive phase modulator that shifts phase an amount depending on applied voltage and depending on polarization state of the incident light. A polarizer is then used to provide the object and reference beams in the same polarization state with equal intensities so they can interfere to create an interferogram with near unity contrast.
A device for analyzing an incident beam, said device comprising a common-path interferometer including a device for generating a reference beam having an intensity and a separate object beam having an intensity traveling along a common axis, and further comprising an adjustable polarizer for adjusting said intensity of said object beam with respect to said intensity of said reference beam so as to be substantially equal.
A common-path point-diffraction phase-shifting interferometer comprising:
A common-path point-diffraction phase-shifting interferometer, comprising:
A method of characterizing the shape of an optical wavefront, comprising the steps of:
A method of generating an interference pattern, comprising the steps of:
A common-path point-diffraction phase-shifting interferometer comprising:
A common-path point-diffraction phase-shifting interferometer, comprising:
An interferometer according to clam 32, wherein said device includes a plate with a half wave well.
An interferometer, comprising:
Dependencies are inferred from the claim text.