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AssigneeKLA-Tencor Technologies Corporation
InventorsJianou Shi, Steve Yifeng Cui, Shiyou Pei, Zhiwei (Steve) Xu, Haiyong (Howard) Wang
Estimating the term…
Non-contact methods for determining a parameter of an insulating film are provided. One method includes measuring at least two surface voltages of the insulating film. The surface voltages are measured after different charge depositions. Measuring the surface voltages is performed in two or more sequences. The method also includes determining individual parameters for the two or more sequences from the surface voltages and the charge depositions. In addition, the method includes determining the parameter of the insulating film as an average of the individual parameters. The parameter is substantially independent of leakage in the insulating film. Another method includes determining a characteristic of nitrogen in an insulating film using two parameters of the insulating film selected from equivalent oxide thickness, optical thickness, and a measure of leakage through the insulating film. The characteristic may be a nitrogen dose, a nitrogen percentage, or a presence of nitrogen in the insulating film.
A non-contact method for determining a parameter of an insulating film formed on a substrate, comprising:
A computer-implemented method, comprising determining a characteristic of nitrogen in an insulating film using two parameters of the insulating film selected from the group consisting of equivalent oxide thickness, optical thickness, and a measure of leakage through the insulating film, wherein the characteristic comprises a nitrogen dose, a nitrogen percentage, or a presence of nitrogen in the insulating film.
A computer-implemented method, comprising determining a characteristic of an insulating film using two parameters of the insulating film selected from the group consisting of equivalent oxide thickness, optical thickness, and a measure of leakage through the insulating film, wherein the characteristic comprises a dose of a component in the insulating film, a percentage of the component in the insulating film, or a presence of the component in the insulating film.
A computer-implemented method, comprising determining at least one composition parameter and physical thickness of an insulating film using a model and two or more parameters of the insulating film as input to the model, wherein the two or more parameters are functions of the at least one composition parameter or the physical thickness, and wherein at least one of the two or more parameters is from a non-contact electrical measurement.
Dependencies are inferred from the claim text.