Scanning probe microscopy system and method of measurement by the same
AssigneeSII NanoTechnology Inc.
InventorsKazunori Ando, Amiko Nihei
Life of this patent
Estimating the term…
Abstract
A scanning probe microscopy system has a cantilever having a probe at a distal end thereof and a heating unit for heating the sample. A moving unit effects relative movement between the cantilever probe and the sample to bring the cantilever probe into contact with a surface of the sample for measuring a property of the sample. A shielding unit shields between the cantilever probe and the sample during heating of the sample by the heating unit.
Claims20
A scanning probe microscopy system comprising:
- a cantilever having a probe at a distal end thereof;
- a heating unit for heating a sample;
- a sample moving unit for moving the sample;
- and
- a shielding unit for shielding between the cantilever and the sample.
A method of measuring a property of a sample using a scanning probe microscopy system, comprising the step of:
- providing a scanning probe microscopy system comprised of a cantilever having a probe at a distal end thereof, a heating unit for heating a sample, and a shielding member for shielding between the cantilever and the sample;
- heating the sample using the heating unit in a state in which the shielding member shields the cantilever from the sample;
- and
- measuring a property of the sample by contacting the probe with a surface of the sample in a state in which the shielding member does not shield the cantilever from the sample.
A scanning probe microscopy system for measuring a property of a sample, the scanning probe microscopy system comprising:
- a cantilever having a probe at a distal end thereof;
- a moving unit for effecting relative movement between a sample and the cantilever to bring the probe into contact with a surface of the sample for measurement of a property of the sample;
- a heating unit for heating the sample;
- a shielding member for shielding between the cantilever and the sample;
- and
- a moving mechanism for moving the shielding member to a first position in which the shielding member is interposed between the cantilever and the sample during heating of the sample by the heating unit and to a second position in which the shielding member is not interposed between the cantilever and the sample during measurement of a property of the sample.
A scanning probe microscopy system for measuring a property of a sample, the scanning probe microscopy system comprising:
- a cantilever having a probe at a distal end thereof for contacting a surface of a sample for measuring a property of the sample;
- a heating unit for heating the sample;
- a shielding member for shielding between the probe of the cantilever and the sample;
- and
- a moving unit for effecting relative movement between the sample and the cantilever so that during heating of the sample by the heating unit the sample is disposed at a first position relative to the probe in which the shielding member shields the probe from the sample, and so that during measurement of a property of the sample the sample is disposed at a second position relative to the probe in which the shielding member does not shield the probe from the sample.
A method of measuring a property of a sample, comprising the steps of:
- providing a cantilever having a probe disposed over a surface of a sample;
- disposing a shielding member at a position between the probe and the sample;
- heating the sample while the shielding member is disposed between the probe and the sample so that a contamination component evaporated from the sample resulting from heating the sample is attached to a surface of the shielding member and is prevented from attaching to the probe;
- removing the shielding member from the position between the probe and the sample;
- effecting relative movement between the cantilever and the sample to bring the probe into contact with the sample surface for measuring a property of the sample.
Dependencies are inferred from the claim text.