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US 7,095,485 B2Granted
Lithographic linear motor, lithographic apparatus, and device manufacturing method
AssigneeASML Netherlands B.V.
InventorsSven Antoin Johan Hol, Johan Cornelis Compter, Erik Roelof Loopstra, Patricia Vreugdewater
Life of this patent
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Abstract
A linear motor having a high driving force, high efficiency and low normal force comprises two opposed magnet tracks and an armature comprising three open coil sets. The linear motor may be used to drive a stage, such as, for example, a mask or wafer stage, in a lithographic apparatus.
Claims17
A lithographic apparatus, comprising:
- a radiation system configured to supplying a beam of radiation;
- a support structure for supporting a patterning device that imparts a desired pattern to said beam of radiation;
- a substrate holder configured to hold a substrate;
- a projection system configured to project said patterned beam of radiation onto a target portion of said substrate;
- and
- a linear motor configured to move one of said support structure and said substrate table, said linear motor comprising:
- a first magnetic plate;
- a second magnetic plate arranged opposite to said first magnetic plate;
- an open coil unit, interposed between said first and second magnetic plates, including a plurality of coils wound about respective ferromagnetic cores;
- and
- a pair of ferromagnetic members, each having no coil wound thereon and spaced apart from the outermost coils on each side of the coil unit,
- wherein said first and second magnetic plates and said coil unit are relatively moveable.
9 more elements
A device manufacturing method, comprising:
- providing a substrate;
- providing a beam of radiation using a radiation system;
- imparting a desired pattern onto said beam of radiation by employing a patterning device;
- projecting said patterned beam of radiation onto a target portion of said substrate;
- and
- displacing at least one of said substrate and said patterning device by using a linear motor, said linear motor comprising first and second magnetic plates that are arranged opposite to each other, an open coil unit between said first and second magnetic plates, and a pair of ferromagnetic members, each having no coil wound thereon and spaced apart from the outermost coils on each side of the coil unit, said coil unit comprising a plurality of coils wound about respective ferromagnetic cores,
- wherein said magnetic plates and said coil unit are relatively moveable.
4 more elements
A linear motor, comprising:
- a first magnetic plate;
- a second magnetic plate arranged opposite to said first magnetic plate;
- and
- an open coil unit, interposed between said first and second magnetic plates, including a plurality of coils wound about respective ferromagnetic cores;
- and
- a pair of ferromagnetic members, each having no coil wound thereon and spaced apart from the outermost coils on each side of the coil unit,
- wherein said first and second magnetic plates and said coil unit are relatively moveable.
4 more elements
Dependencies are inferred from the claim text.