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US 7,095,480 B2Granted
Cooling apparatus
AssigneeCanon Kabushiki Kaisha
InventorsShinichi Hara, Eiji Sakamoto, Yoshinori Miwa, Yasuo Hasegawa, Yoshiki Kino
Life of this patent
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Abstract
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part includes a temperature variation mechanism that changes a temperature of part of the cooling apparatus in a non-contact manner.
Claims1
A cooling apparatus arranged in a vacuum or reduced pressure atmosphere for use with an optical element having an illuminated area onto which light is irradiated concave part, said cooling apparatus comprising:
- a temperature variation mechanism that is arranged at the illuminated area side of the optical element and changes a temperature of the optical element using a radiation;
- and
- a radiation shielding part that faces a non-illuminated area other than the illuminated area of the optical element, and shields radiation to the non-illuminated area,
- wherein said radiation shielding part is a film formed on the non-illuminated area.
1 more element
Dependencies are inferred from the claim text.