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US 7,094,139 B2Granted
Retaining ring with flange for chemical mechanical polishing
AssigneeApplied Materials, Inc.
InventorsDan A. Marohl, Ming-Kuei Tseng
Life of this patent
Estimating the term…
Abstract
A retaining ring has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The outer diameter surface includes an outwardly projecting flange having a lower surface, and the bottom surface includes a plurality of channels.
Claims11
A retaining ring comprising:
- a generally annular body having a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface, wherein the bottom surface is configured to contact a polishing pad during polishing and the outer diameter surface includes a vertical surface, a tapered section and an outwardly projecting flange having a lower surface parallel to the top surface of the annular body, the vertical surface is adjacent to the bottom surface and the tapered section extends upwardly and outwardly from the vertical surface to the lower surface of the flange.
Dependencies are inferred from the claim text.