Jet clean nozzle with multiple spray openings
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih Lung Lan, An Shen Hwang
Life of this patent
Estimating the term…
Abstract
A jet clean nozzle having multiple spray openings which increase the scan density of pressurized water sprayed against the surface of a semiconductor wafer. The jet clean nozzle includes a nozzle body for attachment to a nozzle adaptor that communicates with a water jet pump. Multiple spray chambers extend into the nozzle body, and a spray opening communicates with each spray chamber. In use, pressurized water is forced through the respective spray openings and ejected from the spray chambers as multiple water jets.
Claims14
A jet clean nozzle comprising:
- a nozzle body;
- a plurality of spray chambers provided in said nozzle body, said spray chambers having a longitudinal axis parallel to a longitudinal axis of an inlet chamber, said inlet chamber disposed in said nozzle body for supplying a spray liquid to each of said spray chambers;
- wherein each of said plurality of spray chambers is provided in fluid communication with said inlet chamber
- a plurality of spray openings provided in fluid communication with said plurality of spray chambers respectively, each of said plurality of spray openings for spraying said spray fluid supplied from a respective spray chamber;
- and
- a pivotable support rack for mounting said nozzle body, said support rack laterally pivotable to sweep a plurality of jet sprays produced from said plurality of spray openings laterally across target surface.
A jet clean nozzle comprising:
- a nozzle body;
- a nozzle body;
- a plurality of elongated, generally cylindrical, parallel spray chambers provided in said nozzle body, said spray chambers having a longitudinal axis parallel to a longitudinal axis of an inlet chamber, said inlet chamber provided in said nozzle body upstream of said spray chambers;
- a plurality of spray openings provided in fluid communication with said plurality of spray chambers, respectively, each of said plurality of spray openings for spraying said spray fluid supplied from a respective spray chamber;
- wherein each of said plurality of spray chambers is provided in fluid communication with said inlet chamber, said inlet chamber for supplying a spray liquid to each of said spray chambers;
- and
- an annular, generally tapered front wall in each of said plurality of spray chambers wherein a respective spray opening extends through said tapered front wall in each of said plurality of spray chambers.
A jet clean nozzle comprising:
- a nozzle body having a base portion and a neck portion extending from said base portion;
- a plurality of elongated, generally cylindrical, parallel spray chambers provided in said nozzle body;
- a plurality of spray openings extending through at least a segment of said neck portion and provided in fluid communication with said plurality of spray chambers, respectively;
- and,
- a generally circular spray recess provided in said neck portion of said nozzle body and a nozzle flange circumscribing said spray recess, and wherein said plurality of spray openings extend between said plurality of spray chambers, respectively, and said spray recess.
Dependencies are inferred from the claim text.